ALD Precursor Design for Hard to Deposit Metals - ALD Stories Ep. 6 - a podcast by Beneq
from 2021-09-30T09:17:48
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Tyler sits down with Wayne State University’s Chuck Winter to talk about his approach to designing precursors for ALD. Chuck explains what makes a good ALD precursor and how elegant organic chemistry can enable ALD processes for hard-to-deposit metals, like cobalt and aluminum. Learn more about Chuck’s research here: http://www.clas.wayne.edu/wintergroup/
Papers mentioned in this episode:
https://doi.org/10.1021/acs.chemmater.7b02456 - Co metal ALD
https://doi.org/10.1021/acs.chemmater.8b00445 - Al metal ALD
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