ALE-only Wafer Patterning with AlixLab’s Jonas Sundqvist – ALD Stories Ep. 20 - a podcast by Beneq

In Episode 20, Jonas Sundqvist, ALD researcher, entrepreneur and consultant joins Tyler for his 3rd time on the show to talk about his company, AlixLabs (Eps. 4 & 7). AlixLabs has developed a cutting-edge technology called Atomic Pitch Splitting (APS) which utilizes a topographically-selective atomic layer etching process. Jonas discusses how APS works, why they could potentially pattern substrates without the use of multiple lithography steps, and how AlixLabs can offer semiconductor manufacturers with a simpler, more cost-effective and more precise method of creating features with nanometer spacings. 

In this episode: 

00:00 Introduction 

02:55 AlixLabs and APS Background 

08:30 Topographical Selectivity 

13:30 APS vs Traditional Patterning 

24:30 Cost and Implementation 

33:05 AlixLabs Outlook